| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce the deviation in the amount of discharge in a method for forming a thin film. Ž<P>SOLUTION: The method for forming a thin film by discharging liquid bodies onto a substrate to be treated while relatively scanning the substrate to be treated and a liquid drop discharge head equipped with a plurality of discharge units discharging the liquid bodies includes an inspection process of inspecting the respective amounts of the liquid bodies discharged to a substrate to be inspected by driving two or more of discharge units with a predetermined signal, an adjusting process of adjusting the predetermined signal based on the inspection result, and a thin-film forming process of forming a thin film by arranging the liquid bodies on the substrate to be treated not only by using the adjusted driving signal, but by selectively operating of the plurality of the discharge units for discharge and differentiating the respective scanned discharging patterns of the selected discharge units. The inspection process includes an arrange treatment selecting two or more of the discharging patterns different in the thin-film forming process and arranging the liquid bodies on the substrate to be inspected based on the discharging patterns. Ž<P>COPYRIGHT: (C)2009,JPO&INPIT Ž |
