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发明名称
摘要
申请公布号	JP5168786(B2)	申请公布日期	2013.03.27
申请号	JP20060006258	申请日期	2006.01.13
申请人		发明人
分类号	H01L29/12;H01L21/336;H01L29/739;H01L29/78	主分类号	H01L29/12
代理机构		代理人
主权项
地址

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