Sensor and method for manufacturing a sensor

摘要

The sensor (100) has two spacers (130-1, 130-2) located on a substrate (110). A retaining structure (140-1) is laterally held adjacent to a membrane (120) from one of the spacers. An electrode (150-1) is contacted on a main side (122) of the membrane. Another retaining structure (140-2) is laterally held adjacent to a membrane from the other spacer. Another electrode (150-2) is contacted on another main side (124) of the membrane facing the former main side such that the membrane is suspended over the spacers and electrically connected with contact surfaces (112-1, 112-2) of the substrate. The membrane comprises a semiconductor layer made of a single crystalline material i.e. silicon, or an amorphous material. An independent claim is also included for a method for manufacturing a sensor.