| 摘要 |
PURPOSE: An OLED manufacturing apparatus including an inspecting unit is provided to improve the yield of a panel process by simply inspecting a defect using a buffer chamber in real time. CONSTITUTION: A first buffer chamber is connected to a first chamber to input a substrate outputted from the first chamber and maintains a vacuum state inside. A second chamber is connected to the first buffer chamber to input the substrate outputted from the first buffer chamber. An inspecting unit(509) is installed in the first buffer chamber to inspect the substrate inputted to the first buffer chamber. An alignment unit(507a,507b) aligns the substrate inputted to the first buffer chamber. |
