发明名称 Method of fabricating a lateral double-diffused MOSFET (LDMOS) transistor and a conventional CMOS transistor
摘要 An integrated circuit structure having an LDMOS transistor and a CMOS transistor includes a p-type substrate having a surface, an n-well implanted in the substrate, the first n-well providing a CMOS n-well, a CMOS transistor including a CMOS source with a first p+ region implanted in the n-well, a CMOS drain with a second p+ region implanted in the n-well, and a CMOS gate between the first p+ region and the second p+ region, and an LDMOS transistor including an LDMOS source with an LDMOS source including a p-body implanted in the n-well, a third p+ region implanted in the p-body, and a first n+ region implanted in the p-body, an LDMOS drain including an n-doped shallow drain implanted in the n-well, and a second n+ region implanted in the n-doped shallow drain, and an LDMOS gate between the third p+ region and the second n+ region.
申请公布号 US8405148(B1) 申请公布日期 2013.03.26
申请号 US201113185356 申请日期 2011.07.18
申请人 YOU BUDONG;ZUNIGA MARCO A.;VOLTERRA SEMICONDUCTOR CORPORATION 发明人 YOU BUDONG;ZUNIGA MARCO A.
分类号 H01L29/66;H01L21/336;H01L21/8238;H01L21/8249;H01L27/06;H01L27/092;H01L29/08;H01L29/78 主分类号 H01L29/66
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