发明名称 Semiconductor memory device and manufacturing method thereof
摘要 To provide an active region having first and second diffusion layers positioned at both sides of a gate trench and a third diffusion layer formed on a bottom surface of the gate trench, first and second memory elements connected to the first and second diffusion layers, respectively, a bit line connected to the third diffusion layer, a first gate electrode that covers a first side surface of the gate trench via a gate dielectric film and forms a channel between the first diffusion layer and the third diffusion layer, and a second gate electrode that covers a second side surface of the gate trench via a gate dielectric film and forms a channel between the second diffusion layer and the third diffusion layer. According to the present invention, because separate transistors are formed on both side surfaces of a gate trench, two times of conventional integration can be achieved.
申请公布号 US8405089(B2) 申请公布日期 2013.03.26
申请号 US20100659563 申请日期 2010.03.12
申请人 UCHIYAMA HIROYUKI;ELPIDA MEMORY, INC. 发明人 UCHIYAMA HIROYUKI
分类号 H01L21/8239;H01L21/8242 主分类号 H01L21/8239
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