| 摘要 |
PURPOSE: A plasma inspection apparatus is provided to prevent the generation of particle accumulation by changing gas between a first electrode plate and a second electrode plate into plasma state. CONSTITUTION: A plasma generation unit(130) comprises an RF(Radio Frequency) power, a first electrode plate, and a second electrode plate. The first electrode plate and the second electrode plate are connected to the RF power. The first electrode plate and the second electrode plate are arranged to be faced each other in an internal space of a gas flow unit main body. The plasma generation unit creates light by changing gas passing through the gas flow unit main body into plasma state. A spectral unit(150) splits the light and changes it into an electric signal. [Reference numerals] (110) Gas flow unit; (130) Plasma generation unit; (150) Spectral unit; (170) Control unit |
