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发明名称
Verfahren zur Durchfuehrung eines lokalen Bearbeitungsvorganges eines Werkstueckes fuer Halbleiterzwecke
摘要
申请公布号
DE1427757(A1)
申请公布日期
1969.08.28
申请号
DE19641427757
申请日期
1964.08.24
申请人
SIEMENS AG
发明人
FRODL,OTTO
分类号
B21D28/04;H01L21/00
主分类号
B21D28/04
代理机构
代理人
主权项
地址
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