发明名称 |
Master teaching jig |
摘要 |
A disk carrier for teaching disk positioning in a substrate changing system. The disk carrier composed of a panel having a disk opening configured to receive a disk and a plurality of beam sensors disposed around the disk opening to project beams parallel to a surface of the disk when secured within the disk opening. The plurality of beam sensors may be composed of at least one beam sensor on each of a front side and rear side of the panel. |
申请公布号 |
US8406918(B2) |
申请公布日期 |
2013.03.26 |
申请号 |
US20090643929 |
申请日期 |
2009.12.21 |
申请人 |
TAN YI CHUN;KHOR HUAT SENG;TAN EANG KEONG;ANG CHUN BENG;TANG CHAY HOON;WD MEDIA, LLC |
发明人 |
TAN YI CHUN;KHOR HUAT SENG;TAN EANG KEONG;ANG CHUN BENG;TANG CHAY HOON |
分类号 |
G06F7/00;G01B5/28;G01C17/38;G01P11/00;G05B21/00;G06F17/00 |
主分类号 |
G06F7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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