发明名称 METHOD FOR PRODUCING A SEMICONDUCTOR COMPONENT
摘要 <p>A method for producing a semiconductor component, in which a semiconductor layer is separated from a substrate by irradiation with laser pulses, the pulse duration of the laser pulses being less than or equal to 10 ns. The laser pulses have a spatial beam profile with a flank slope is chosen to be gentle enough to prevent cracks in the semiconductor layer that arise as a result of thermally induced lateral stresses during the separation of semiconductor layer and substrate.</p>
申请公布号 KR101247727(B1) 申请公布日期 2013.03.26
申请号 KR20057014053 申请日期 2004.01.27
申请人 发明人
分类号 H01L21/268;H01L21/78;H01L33/00;H01L33/12 主分类号 H01L21/268
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