发明名称 |
Compensation of stress effects on pressure sensor components |
摘要 |
Pressure sensors having components with reduced variations due to stresses caused by various layers and components that are included in the manufacturing process. In one example, a first stress in a first direction causes a variation in a component. A second stress in a second direction is applied, thereby reducing the variation in the component. The first and second stresses may be caused by a polysilicon layer, while the component may be a resistor in a Wheatstone bridge. |
申请公布号 |
US8402835(B2) |
申请公布日期 |
2013.03.26 |
申请号 |
US201113029114 |
申请日期 |
2011.02.16 |
申请人 |
AUGUST RICHARD J.;DOELLE MICHAEL B.;SILICON MICROSTRUCTURES, INC. |
发明人 |
AUGUST RICHARD J.;DOELLE MICHAEL B. |
分类号 |
G01L19/04;G01L9/02 |
主分类号 |
G01L19/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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