发明名称 Compensation of stress effects on pressure sensor components
摘要 Pressure sensors having components with reduced variations due to stresses caused by various layers and components that are included in the manufacturing process. In one example, a first stress in a first direction causes a variation in a component. A second stress in a second direction is applied, thereby reducing the variation in the component. The first and second stresses may be caused by a polysilicon layer, while the component may be a resistor in a Wheatstone bridge.
申请公布号 US8402835(B2) 申请公布日期 2013.03.26
申请号 US201113029114 申请日期 2011.02.16
申请人 AUGUST RICHARD J.;DOELLE MICHAEL B.;SILICON MICROSTRUCTURES, INC. 发明人 AUGUST RICHARD J.;DOELLE MICHAEL B.
分类号 G01L19/04;G01L9/02 主分类号 G01L19/04
代理机构 代理人
主权项
地址