发明名称 Apparatus for inspecting ingot and method for inspecting ingot having the same
摘要 PURPOSE: An ingot inspecting device and an ingot inspection method using the same are provided to photograph an ingot being processed as a semi-finished product shape through a squaring processing by a scanning method with a photographing device, thereby accurately inspecting a size of the ingot with respect to a sectional shape of the ingot. CONSTITUTION: An ingot inspecting device comprises a mount(100), a photographing device, a main beam, and a controller. An ingot is seated on the mount. The photographing device scans a surface outline of the ingot in one side of the mount. The main beam supports the photographing device and drives the same to a three-shaft direction mutually crossed. The controller obtains a size of the ingot by receiving scan images from the photographing device, thereby calculating a central shaft position of the ingot. The controller compares a preset reference size range and a reference central shaft position range, thereby determining an ingot processing state.
申请公布号 KR101246747(B1) 申请公布日期 2013.03.26
申请号 KR20110040801 申请日期 2011.04.29
申请人 发明人
分类号 C30B29/06;G01B11/24;H01L21/66 主分类号 C30B29/06
代理机构 代理人
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