发明名称 DIVIDING DEVICE
摘要 PURPOSE: A dividing device is provided to reduce working hours by easily accommodating chips. CONSTITUTION: A sustaining table(31) includes cutting lines on a workpiece and a groove for a cutting blade(43). A cutting unit(4) includes the cutting blade for the workpiece. A drying unit dries chips divided by the cutting unit. A bulk accommodating unit(15) storages the chips. A chip falling unit(16) drops the chips.
申请公布号 KR20130029720(A) 申请公布日期 2013.03.25
申请号 KR20120099112 申请日期 2012.09.07
申请人 DISCO CORPORATION 发明人 ISHII SHIGERU;OMURO YOSHIHIRO;HIRAGA HIROYUKI;SATO MASASHI;KAKUTA YUKIHISA
分类号 H01L21/301;H01L21/02 主分类号 H01L21/301
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