MICRO ELECTRO MECHANICAL SYSTEMS COMPONENT

摘要

PURPOSE: A MEMS(Micro Electro Mechanical System) element is provided to prevent interference with peripheral sensors and influence on disturbance or noise by using a predetermined section of a membrane positioned above a space between a post and as topper. CONSTITUTION: A MEMS element comprises a plate-shaped membrane(110), a post(130), a stopper(140), and a cap(150). The post is arranged under the edge of the membrane. The stopper is arranged under the membrane. A space is formed between the post and the stopper. The cap is arranged under the post to cover the post.