发明名称 VACUUM ROLL TO ROLL DEVICE AND MANUFACTURING METHOD FOR ROLL TYPE SUBSTRATE
摘要 PURPOSE: A vacuum roll to roll device and a manufacturing method for a roll type substrate are provided to minimize the inflow of air into a high vacuum chamber by changing designs of both side of the roll type substrate. CONSTITUTION: A vacuum roll to roll device comprises a first chamber, a second chamber, shutters(200a,200b), sealing members(300a,300b) attached to the shutters, and a roll type plate(100). The second chamber is adjacent to the first chamber. The shutters are arranged between the first and second chambers. The roll type substrate is moved by the sealing members from the first chamber to the second chamber.
申请公布号 KR20130029242(A) 申请公布日期 2013.03.22
申请号 KR20110092525 申请日期 2011.09.14
申请人 SAMSUNG DISPLAY CO., LTD. 发明人 KIM, SANG MI;JO, GUG RAE;CHANG, JAE HYUK;LEE, SEUNG JUN;LEE, SEUNG MIN;LEE, DAE YOUNG;LEE, KI BEOM
分类号 C23C14/56;C23C14/34 主分类号 C23C14/56
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