发明名称 |
NON-VOLATILE STORAGE ELEMENT, NON-VOLATILE STORAGE DEVICE, PRODUCTION METHOD FOR NON-VOLATILE STORAGE ELEMENT, AND PRODUCTION METHOD FOR NON-VOLATILE STORAGE DEVICE |
摘要 |
A non-volatile storage element (20) comprising: a first electrode (105); a second electrode (107); a variable resistance layer (106) interposed between the first electrode (105) and the second electrode (107), and configured by laminating a first variable resistance layer (1061) connected to the first electrode (105), and a second variable resistance layer (1062) connected to the second electrode (107); and a side wall protection layer (108) having oxygen barrier properties and covering the side walls of the variable resistance layer (106). The first variable resistance layer (1061) is configured by a first metal oxide (106a), and a third metal oxide (106c) formed around the first metal oxide and having a lower oxygen deficiency than the first metal oxide (106a). The second variable resistance layer (1062) is configured from a second metal oxide (106b) having a lower oxygen deficiency than the first metal oxide (106a). |
申请公布号 |
WO2013038647(A1) |
申请公布日期 |
2013.03.21 |
申请号 |
WO2012JP05727 |
申请日期 |
2012.09.10 |
申请人 |
PANASONIC CORPORATION;YONEDA, SHINICHI;MIKAWA, TAKUMI;ITO, SATORU;HAYAKAWA, YUKIO;HIMENO, ATSUSHI |
发明人 |
YONEDA, SHINICHI;MIKAWA, TAKUMI;ITO, SATORU;HAYAKAWA, YUKIO;HIMENO, ATSUSHI |
分类号 |
H01L27/105;H01L45/00;H01L49/00 |
主分类号 |
H01L27/105 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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