发明名称 DICING SHEET SUBSTRATE FILM AND DICING SHEET
摘要 Provided is a dicing sheet substrate film which, without requiring additional physical energy such as an electron beam or gamma rays, can reduce dicing debris generated during dicing of an object being cut. This dicing sheet substrate film (2) is provided with a resin layer (A). The resin layer (A) contains a ring-containing resin (a1) which is a thermoplastic resin having, as a structural unit, monomers having at least one of an aromatic ring or an aliphatic ring, and an acyclic olefin resin (a2) which is an olefin-based thermoplastic resin other than the ring-containing resin (a1), wherein the content of the ring-containing resin (a1) in the resin layer (A) is greater than 3.0 mass%. Also provided is a dicing sheet (1) which is provided with the dicing sheet substrate film and an adhesive layer (3) arranged on said film.
申请公布号 WO2013038966(A1) 申请公布日期 2013.03.21
申请号 WO2012JP72571 申请日期 2012.09.05
申请人 LINTEC CORPORATION;TAYA, NAOKI;UEDA, MASASHI;SATO, YOSUKE;ITO, MASAHARU 发明人 TAYA, NAOKI;UEDA, MASASHI;SATO, YOSUKE;ITO, MASAHARU
分类号 H01L21/301;C09J7/02;C09J11/06;C09J133/08;C09J175/14 主分类号 H01L21/301
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