| 摘要 |
<P>PROBLEM TO BE SOLVED: To certainly suppress internal contamination caused by the proliferation of bacteria. <P>SOLUTION: In this chamber unit, a first chamber unit includes a first communication wall and a first section wall, and a second chamber unit includes a second communication wall and a second section wall. When having communicated a first communication part and a second communication part, a communication part seal material seals between the first and second communication walls. When having communicated the first and second communication parts, a section part seal material seals between the first and second section walls. A decontamination means introduces a decontamination gas. The chamber unit has: a first state in which the first and second section walls are stuck through the section part seal material while there is a gap between the first communication wall and the second communication wall; and a second state in which at least the first and second communication walls are stuck through the communication part seal material. The decontamination means decontaminates at least the first and second communication parts and the communication part seal material in the first state. <P>COPYRIGHT: (C)2013,JPO&INPIT |
