| 摘要 |
The invention provides an excimer lamp having an ultraviolet reflection layer comprising micro-particles containing silicon oxide, which can inhibit the degree of illumination decrease even after long-term lighting to efficiently emit vacuum ultraviolet light. An excimer lamp (10) comprises a discharge container (20) made of silica glass having a discharge space (S), wherein a pair of electrodes (11, 12) is installed in the state that the silica glass forming the discharge container (20) is clamped, gas for discharging is sealed in the discharge space (S), and the ultraviolet reflection layer (30) is formed at the inner surface of the discharge container (20); the excimer lamp (10) is characterized in that the ultraviolet reflection layer (30) comprises silicon dioxide particles containing OH groups and micro-particles having melting points higher than that of silicon dioxide, and the concentration of OH groups in the silicon dioxide particles forming the ultraviolet reflection layer (30) is more than 10 wt ppm. |
