| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laser beam machining head that has the function of thoroughly irradiating a protective glass so that contaminant substance adhering to the protective glass for protecting a condenser lens can be detected. <P>SOLUTION: The laser beam machining head, which includes a focusing lens 5 that collects laser light oscillated by a laser oscillator and directs it to a workpiece, a protective glass 31 that is provided on the side of the workpiece of the focusing lens 5 to protect the focusing lens 5, and a contamination detector 33 to detect the contamination of the protective glass 31, includes a detection light irradiation unit 49 to direct a detection light to the entire surface of the protective glass 31 from a direction inclined to the optical axis of the laser light. The detection light irradiation unit 49 includes a ring member 57, wherein a plurality of point light sources 59 are provided on a tapered surface 57T formed on the inner peripheral surface of the ring member 57 and an air jetting unit 35 is provided on the side of the workpiece of the protective glass 31 to form an air curtain for blowing out contaminant substance in one direction. <P>COPYRIGHT: (C)2013,JPO&INPIT |
