| 摘要 |
<P>PROBLEM TO BE SOLVED: To simplify an ignition mechanism while avoiding deterioration due to plasma. <P>SOLUTION: A plasma processing device 1 comprises: a cylindrical housing 11 one end of which is blocked by a blocking plate 11b and the other end of which is formed as an opening end; and a rod-like radiator 14 standing on an inner face of the blocking plate 11b to extend in a cylinder longitudinal direction of the housing 11 and radiating inputted high frequency signals S1. The plasma processing device 1 generates plasma P extending outward of the housing 11 through an air current from a vicinity of a tip of the radiator 14 while discharging gas G is supplied in the housing 11 to generate the air current directed to an opening end side from the blocking plate 11b side by a gas supply part 4 and the radiator 14 radiates the high frequency signals S1. The plasma processing device 1 is provided with an ignition mechanism 5 having an ignition conductor 5a generating electric discharge D between it and the radiator 14 to ignite the plasma P, and a tip of the ignition conductor 5a as a discharging electrode is arranged on an upper stream side of the air current than the tip of the radiator 14. <P>COPYRIGHT: (C)2013,JPO&INPIT |
