发明名称 METHOD OF PROCESSING OXIDE CONDUCTIVE THIN FILM, ELECTRONIC DEVICE MANUFACTURED USING THE SAME, DROPLET DISCHARGE HEAD AND DROPLET DISCHARGE DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a method of processing an oxide conductive thin film having a desired surface composition, an electronic device manufactured using the method of processing an oxide conductive thin film, a droplet discharge head and a droplet discharge device. <P>SOLUTION: An ABO<SB POS="POST">3</SB>oxide conductive thin film represented by the general formula ABO<SB POS="POST">3</SB>is processed with a liquid containing at least water, and the surface atomic ratio A/B of the ABO<SB POS="POST">3</SB>oxide conductive thin film is made close to the stoichiometric ratio. The liquid contains at least water, and is preferably a mixture of pure water and an organic solvent, or pure water. The organic solvent preferably at least contains one kind of alcohol. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013055174(A) 申请公布日期 2013.03.21
申请号 JP20110191349 申请日期 2011.09.02
申请人 RICOH CO LTD 发明人 CHIN KENHO;MACHIDA OSAMU;TASHIRO RYO;SHIMOFUKU HIKARI;AKIYAMA ZENICHI;YAGI MASAHIRO
分类号 H01L41/39;C01G55/00;C23C14/08;H01L41/09;H01L41/18;H01L41/22 主分类号 H01L41/39
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