| 摘要 |
<P>PROBLEM TO BE SOLVED: To appropriately adjust a quantity of light without shortening the life time of a light source in an exposure device. <P>SOLUTION: To adjust a quantity of light, a quantity of projected light is measured while the effective mirror of a DMD is kept on, and a use rate which is the ratio of a measured quantity of light to a target quantity of light is determined. Then, based on the use rate, dimmer filter data indicating the array of mirrors that are not used is created. At this time, the mirrors that are not used are arranged so as to be nearly uniformly distributed and in an irregular pattern. While the adjustment of a quantity of light is made using the DMD, the output of the discharge lamp gradually decreases. When the measured quantity of light does not reach the target quantity of light, the output of the discharge lamp is increased so that the measured quantity of light reaches a reference quantity of light larger than the target quantity of light by a predetermined quantity. <P>COPYRIGHT: (C)2013,JPO&INPIT |
