发明名称 METHOD FOR MANUFACTURING A SUPERHYDROPHOBIC FILM SHEET
摘要 The present invention relates to a method for manufacturing a superhydrophobic film sheet, and more particularly, to a method for manufacturing a superhydrophobic film sheet by generating a structure having projections for providing a superhydrophobic effect such as that of a real lotus leaf by controlling the number of times, and the amount of time, a photoresist is baked and providing a superhydrophobic surface by coating a polydimethylsiloxane (PDMS) with a transparent material having hydrophobic qualities. The method comprises the steps of: (a) cleaning a surface of a silicon wafer; (b) coating the top of the silicon wafer with a photoresist (AZ4620) using a spin coater, and soft-baking the silicon wafer in an oven; (c) exposing a structure manufactured in step (b) using a mask aligner; (d) developing using a photoresist developing solution(AZ400K); (e) performing PDMS molding on a top of a structure manufactured in step (d); and (f) removing the photoresist (AZ4620) using acetone, thereby completing a superhydrophobic film sheet having projections on an end thereof.
申请公布号 WO2013015562(A3) 申请公布日期 2013.03.21
申请号 WO2012KR05774 申请日期 2012.07.19
申请人 INDUSTRY FOUNDATION OF CHONNAM NATIONAL UNIVERSITY;LEE, DONG WEON;GO, GUN;PARK, SEUNG HWAN;LEE, SA MYUNG;PARK, JONG SUNG 发明人 LEE, DONG WEON;GO, GUN;PARK, SEUNG HWAN;LEE, SA MYUNG;PARK, JONG SUNG
分类号 H01L21/027 主分类号 H01L21/027
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