| 摘要 |
The invention includes: a base; a table supported by the base; a tubular rod connected to a side of the table via a joint; a drive mechanism that moves the rod forward and backward; and a laser interferometer that detects displacement of the table relative to the base. The joint is provided by a supplying-discharging static-pressure joint and includes: a movement surface that is connected to the table and is orthogonal to a moving direction of the table; a drive surface that is connected to the rod and faces the movement surface; and a fluid supply channel supplying fluid to a static-pressure clearance between the movement surface and the drive surface. The laser interferometer includes a laser path having an optical axis along the moving direction passing through the inside of the rod of which a pressure is reduced and the drive surface and reflect on the movement surface.
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