发明名称 SEMICONDUCTOR DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a configuration which realizes high-speed response and high-speed drive of a semiconductor device by improve ON-state characteristics of a transistor, and also provide a reliable semiconductor device. <P>SOLUTION: A transistor comprises a semiconductor layer, a source electrode layer or drain electrode layer, a gate insulator, and a gate electrode layer which are sequentially stacked. The semiconductor layer is a non-single-crystal oxide semiconductor layer which at least contains indium, a group 3 element, zinc and oxygen. The group 3 element functions as a stabilizer. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013055329(A) 申请公布日期 2013.03.21
申请号 JP20120165412 申请日期 2012.07.26
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 YAMAZAKI SHUNPEI
分类号 H01L29/786;H01L21/336;H01L21/8234;H01L21/8242;H01L21/8247;H01L27/08;H01L27/088;H01L27/108;H01L27/115;H01L29/788;H01L29/792 主分类号 H01L29/786
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