| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain accurate space charge distribution, even for a sample of a dielectric material with a large acoustic attenuation or a multilayer dielectric comprising a stack of dielectric samples with different acoustic properties, by making a real-time signal correction taking acoustic impedance into account while measuring the space charge distribution. <P>SOLUTION: A method of calibrating the space charge distribution includes; a step for measuring the magnitude of an acoustic wave reflected at a first electrode interface, connected to a piezo-electric element, using an acoustic impedance microscope without a sample in place, setting a second electrode on the first electrode and measuring the reflected acoustic wave, and setting a sample on the first electrode and measuring the waveform of the reflected acoustic wave; a step for computing various acoustic impedances, and thereby computing a damping rate α of the acoustic wave based on the thickness of the sample and the various acoustic impedances; and a correction step for setting the sample on a space charge distribution measuring device, measuring a space charge distribution measurement signal P<SB POS="POST">0</SB>(t), and obtaining a corrected space charge distribution P<SB POS="POST">s</SB>(z) from the measurement signal P<SB POS="POST">0</SB>(t) based on a sample thickness d and the damping rate α. <P>COPYRIGHT: (C)2013,JPO&INPIT |
