发明名称 |
METHOD FOR THE TEMPERATURE MEASUREMENT OF SUBSTRATES IN A VACUUM CHAMBER |
摘要 |
The invention relates to a temperature-measuring system, comprising a temperature sensor and a reference body, wherein means for determining temperature changes of the reference body and/or for control of the temperature of the reference body are provided. When the temperature measuring-system is used in a vacuum, the reference body forms no substantial material thermal bridges to the temperature sensor and the reference body shields the temperature sensor with respect to the environment in such a way that only radiation that comes from the surfaces of the reference and from surfaces of which the temperature is to be determined reaches the surface of the temperature sensor. |
申请公布号 |
WO2013037467(A2) |
申请公布日期 |
2013.03.21 |
申请号 |
WO2012EP03759 |
申请日期 |
2012.09.07 |
申请人 |
OERLIKON TRADING AG, TRUEBBACH;KRASSNITZER, SIEGFRIED;ESSELBACH, MARKUS |
发明人 |
KRASSNITZER, SIEGFRIED;ESSELBACH, MARKUS |
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