SOLAR BATTERY CELL TEST EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide solar battery cell test equipment capable of simultaneously photographing a reflection image and a transmission image at the same position.

SOLUTION: Solar battery cell test equipment 1 comprises: a first irradiation part 4 for a first surface of a semiconductor wafer 2 with visible light; a first imaging part 5 for acquiring a reflection image of the semiconductor wafer 2 by receiving the visible light reflected by the semiconductor wafer 2; a second irradiation part 6 for irradiating a second surface facing the first surface of the semiconductor wafer 2 with infrared light; a second imaging part 7 for acquiring a transmission image of the semiconductor wafer 2 by receiving the infrared light transmitted through the semiconductor wafer 2; and a determination part 21d for determining whether the semiconductor wafer 2 has defects on the basis of the reflection image and the transmission image. The solar battery cell test equipment 1 is provided with a beam splitter 11 arranged between the first imaging part 5 and the second imaging part 7, and the beam splitter 11 guides light of less than a set wavelength to the first imaging part 5 and light of the set wavelength or more to the second imaging part 7.

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