发明名称 LCD EXPOSURE PLATFORM DEVICE AND EXPOSURE SYSTEM
摘要 <p>An LCD exposure platform device for placing a substrate (20), including a platform (11), with the upper surface thereof contacting the bottom surface of the substrate (20), and a plurality of shift thimbles (121) parallel to the upper surface of the platform (11). The pinheads of the shift thimbles (121) are opposite to the side face of the substrate (20). The substrate (20) is pushed to shift horizontally by way of the movement of the shift thimbles (121). Also proposed is an LCD exposure system employing an LCD exposure platform device. By way of only moving the substrate (20), the movement of the platform (11) or the entire LCD exposure platform device is avoided, making the operation more convenient. Moreover, since the platform (11) always remains in a fixed position, the requirements on its strength can be lowered appropriately. In addition, the substrate (20) always adheres to the platform (11) during shift and exposure, avoiding separation of the substrate (20) and the platform (11), shortening the manufacture time of the exposure process, making the manufacture of the entire liquid crystal panel more efficient.</p>
申请公布号 WO2013037139(A1) 申请公布日期 2013.03.21
申请号 WO2011CN79783 申请日期 2011.09.17
申请人 SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.;CHEN, HSIAO-HSIEN 发明人 CHEN, HSIAO-HSIEN
分类号 G03F7/20;H01L21/68 主分类号 G03F7/20
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