Micro-electro-mechanical systems component e.g. valve component, has anchorage structure setting counter-element under tensile stress so that deflections of counter-element counteract perpendicular to layer planes

摘要

The component (10) has a fixed counter-element (14) is provided with through-holes (16) that are formed in the structure over a movable membrane (11). A sealing structure is formed between the membrane and the counter-element. The counter-element is connected to the substrate via an anchorage structure (18). The counter-element is connected to a substrate (1) via the anchorage structure, which sets the counter-element under tensile stress so that pressure or acceleration-induced deflections of the counter-element counteract perpendicular to layer planes. An independent claim is also included for a valve component.