| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sample characteristic evaluation device and characteristic evaluation method in which the degree of the deterioration of a sample can be determined from measurement results before and after deterioration by stably measuring the resistance and electrostatic capacity of a high resistance sample whose initial specific resistance is equal to or higher than 10<SP POS="POST">9</SP>[Ω m]. <P>SOLUTION: The device comprises evaluation voltage application means for applying an evaluation voltage to a sample, the evaluation voltage being obtained by overlapping an AC voltage in which an amplitude able to vary frequency is 0.2 V or higher with a DC voltage; evaluation current measuring means for measuring an evaluation current flowing in the sample when the evaluation voltage is applied; calculating means for calculating the resistance of the sample from the relation between the evaluation voltage and evaluation current; and deterioration determining means for determining the degree of deterioration of the sample from the resistance of an initial sample and the resistance of the sample that has deteriorated, calculated from the results obtained by the calculating means. <P>COPYRIGHT: (C)2013,JPO&INPIT |
