发明名称 MACHINING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a machining device capable of preventing beforehand a mismatch between a workpiece to be processed and a chuck table that retains the same. <P>SOLUTION: There is provided the machining device 1 having: the chuck table 10 that retains the workpiece W to be processed; a machining means 20 for machining the retained workpiece W to be processed; a control means 100 for controlling the machining means 20 and the chuck table 10; a detection means 30 for detecting a distinguishing mark 13; a recording means 110 for recording, for respective workpieces W to be processed, the information about corresponding relations between the distinguishing mark 13 and the workpiece W to be processed that can be held by the chuck table 10; and a warning means 120 for emitting a warning. The chuck table 10 includes a retaining section 11 that retains the workpiece W to be processed and the distinguishing mark 13 that identifies the chuck table 10. The control means 100 brings the warning means 120 to emit a warning in a case wherein the distinguishing mark 13 detected before the start of processing operation does not have corresponding relations with the workpiece W to be ready for machining operation. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013052483(A) 申请公布日期 2013.03.21
申请号 JP20110193318 申请日期 2011.09.05
申请人 DISCO CORP 发明人 YOSHIMURA EIICHI;NOGUCHI SHINICHIRO;SASAKI SHOHEI
分类号 B24B49/10;H01L21/301 主分类号 B24B49/10
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