| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a composite body having high conductivity, high bonding strength with a group III nitride crystal, and high optical transparency. <P>SOLUTION: A composite body 100 includes a group III nitride crystal 110 and an oxide film 120 disposed on the group III nitride crystal 110. The oxide film 120 includes a first region 121 and a second region 122 having mutually different dopant concentrations. The second region 122 has a higher dopant concentration than the first region 121. <P>COPYRIGHT: (C)2013,JPO&INPIT |
