发明名称 Black Silicon Solar Cell and Its Preparation Method
摘要 A black silicon solar cell includes a metal back electrode, the crystal silicon, a black silicon layer, a passivation layer and a metal gate; wherein, the metal back electrode is located on the back surface of the crystal silicon, the black silicon layer is located on the crystal silicon, the passivation layer is located on the black silicon layer, the metal gate is located on the passivation layer. The fabrication method includes: carrying out pretreatment of the silicon wafer; preparing the black silicon layer on the surface of the pretreated silicon wafer by using plasma immersion ion implantation technology; preparing an emitter on the black silicon layer, and carrying out passivation treatment on the emitter to form the passivation layer; respectively preparing the metal back electrode and the metal gate on the back surface of the single crystal silicon wafer and the passivation layer, respectively.
申请公布号 US2013068297(A1) 申请公布日期 2013.03.21
申请号 US201013699740 申请日期 2010.08.05
申请人 XIA YANG;LIU BANGWU;LI CHAOBO;LIU JIE;WANG MINGGANG;LI YONGTAO;THE INSTITUTE OF MICROELECTRONICS OF CHINESE ACADE ACADEMY OF SCIENCES 发明人 XIA YANG;LIU BANGWU;LI CHAOBO;LIU JIE;WANG MINGGANG;LI YONGTAO
分类号 H01L31/0224;H01L31/18 主分类号 H01L31/0224
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