| 摘要 |
An ultrasonic probe includes a substrate having an opening section, a support film disposed on the substrate, a piezoelectric body disposed on the support film at the opening section, first and second resin sections, and a communicating section. The first resin section is disposed at a position overlapping the opening section in the plan view and spaced apart from the support film with the liquid being arranged therebetween. The communicating section is connected to the first resin section. The second resin section is connected to the communicating section to house the liquid flowing in through a communication hole of the communicating section. At least portions of the first and second resin sections are configured to deform such that a first liquid filled volume formed between the first resin section and the support film and a second liquid filled volume formed by the second resin section are changed.
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