| 摘要 |
Disclosed herein is a specimen conveyance apparatus including: a main body having a plate-like shape and including a storage chamber having a recess-like shape formed thereon; a cover member covering the main body; a sealing member inserted between the main body and the cover member and blocking the storage chamber and the outside; a suction pipe installed within the main body, having a suction valve, and sucking external air; a filter installed within the main body, removing a reactive gas and particulate foreign material from air sucked through the suction pipe, and allowing an inert gas to pass therethrough toward the storage chamber; a discharge pipe installed within the main body, having a discharge valve, and discharging a gas to the outside; and a pump discharging a gas present in the storage chamber to the outside through the discharge pipe. |
