LASER BEAM SYNTHESIZER, LASER ANNEALING DEVICE, AND LASER ANNEALING METHOD

摘要

PROBLEM TO BE SOLVED: To uniformize intensity distribution of a plurality of laser beams.

SOLUTION: A laser beam synthesizer includes: a first optical system 14 which forms a first uniform surface 16 on which intensity distribution of a first laser light 12 is uniformized; a second optical system 24 which forms a second uniform surface 26 on which the intensity distribution of a second laser light 22 having wavelength different from the first laser light; an optical synthesizing system 30 which synthesizes the first laser light and the second laser light; and an optical coupling system 36 which transfers the first uniform surface and the second uniform surface to the same position of a workpiece 40.

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