| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an apparatus for growing a single crystal, which reduces heat loss while holding an inner shield. <P>SOLUTION: The apparatus for growing a single crystal by a Czochralski method includes a main chamber housing a crucible accommodating a raw material melt, a heater arranged to surround the crucible, and a shield arranged to surround the heater. The shield has a heat shield formed from a carbon fiber heat insulating material and an inner shield formed from a carbon material or a carbon fiber composite material at least on the heater side of the heat shield. The inner shield is directly supported at the lower end part by a supporting member formed from a carbon fiber heat insulating material. <P>COPYRIGHT: (C)2013,JPO&INPIT |
