发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To prevent mutual influence of the voltage variations at gate electrodes of adjacent transistors. <P>SOLUTION: A semiconductor device includes an active region surrounded by an element isolation region 220 in a substrate 100, buried gate electrodes 410a and 410b formed in the active region, and a diffusion layer region 320 provided between the buried gate electrodes 410a and 410b and formed so as to reach the bottoms of the buried gate electrodes 410a and 410b. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013055213(A) 申请公布日期 2013.03.21
申请号 JP20110192343 申请日期 2011.09.05
申请人 ELPIDA MEMORY INC 发明人 KUDO TOMOHIKO;OYU KIYONORI
分类号 H01L21/8242;H01L21/336;H01L27/108;H01L29/78 主分类号 H01L21/8242
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