CHARGED PARTICLE BEAM IRRADIATION APPARATUS, CHARGED PARTICLE BEAM DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

摘要

An irradiation apparatus includes: a measurement device including a shield in which plural apertures are formed, and plural detectors configured to respectively detect plural charged particle beams respectively having passed through the plural apertures; a scanning mechanism configured to perform scanning of the plural beams and the measurement device relative to each other so that the plural beams respectively traverse edges of the plural apertures; and a controller configured to perform control of the scanning mechanism and the measurement device to obtain a characteristic of each beam. The controller is configured to perform the control such that in a period of the scanning, an energy, shielded by the shield, out of an energy of one beam increases with time, while an energy, shielded by the shield, out of an energy of another beam decreases with time.