ANTIREFLECTIVE COATING AND SUBSTRATES COATED THEREWITH

摘要

An antireflective coating includes a first high index of refraction coating layer; a first low index of refraction coating layer over the first high index of refraction coating layer; a second high index of refraction coating layer over the first low index of refraction coating layer; and a second low index of refraction coating layer over the second high index of refraction coating layer.