发明名称 SEMICONDUCTOR DEVICE HAVING TRENCH STRUCTURE AND METHOD OF MANUFACTURING THE SAME
摘要 According to an embodiment, a trench structure and a second semiconductor layer are provided in a semiconductor device. In the trench structure, a trench is provided in a surface of a device termination portion with a first semiconductor layer of a first conductive type including a device portion and the device termination portion, and an insulator is buried in the trench in such a manner to cover the trench. The second semiconductor layer, which is of a second conductive type, is provided on the surface of the first semiconductor layer, is in contact with at least a side on the device portion of the trench, and has a smaller depth than the trench. The insulator and a top passivation film for the semiconductor device are made of the same material.
申请公布号 US2013069109(A1) 申请公布日期 2013.03.21
申请号 US201213419400 申请日期 2012.03.13
申请人 MATSUDA SHIZUE;SATO SHINGO;SAITO WATARU;KABUSHIKI KAISHA TOSHIBA 发明人 MATSUDA SHIZUE;SATO SHINGO;SAITO WATARU
分类号 H01L29/739;H01L21/302;H01L29/78 主分类号 H01L29/739
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