发明名称 SCANNING OPTICAL SYSTEM MANUFACTURING METHOD, BEAM INSPECTION METHOD, AND BEAM INSPECTION APPARATUS
摘要 A scanning optical system manufacturing method includes receiving a scanning beam, emitted from a scanning unit including an incident optical system and a deflecting device and passed through an image-forming optical system, in an area having a width in the main scanning direction narrower than a spot diameter of the scanning beam by a light-receiving unit configured to be capable of being displaced at each image height position in the main scanning direction, calculating, based on an output of the light-receiving unit, a peak light quantity at each image height position of the scanning beam, smoothing distribution data of the peak light quantity at each of the image height position acquired by the calculating, and determining, based on the data acquired by the smoothing, either nondefective/defective states of the scanning unit and the image-forming optical system or a nondefective/defective state of only the image-forming optical system.
申请公布号 US2013068927(A1) 申请公布日期 2013.03.21
申请号 US201213608997 申请日期 2012.09.10
申请人 YOSHIDA HIROKI;CANON KABUSHIKI KAISHA 发明人 YOSHIDA HIROKI
分类号 G01J1/44 主分类号 G01J1/44
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