SAMPLE HEATING HOLDER FOR MICROSCOPE OR ANALYSIS EQUIPMENT THAT USES ELECTRON BEAM, AND SAMPLE HEATING METHOD THAT USES SAMPLE HEATING HOLDER

摘要

Provided are: a sample heating holder for a microscope or analysis equipment that uses an electron beam, said holder not requiring an ultra-high vacuum, and being capable of stably preventing contamination of a sample surface without causing destruction of the sample surface; and a sample heating method that uses the sample heating holder. The sample heating holder for a microscope or analysis equipment that uses an electron beam is characterized by being provided with a positive temperature coefficient (PTC) thermistor as a heating element, and has excellent capacity for suppression of thermal drift and growth of carbon contamination during observation and analysis.