发明名称 FLEXIBLE SEMICONDUCTOR DEVICE, MANUFACTURING METHOD FOR SAME, AND IMAGE DISPLAY DEVICE
摘要 <p>There is provided a method for manufacturing a flexible semiconductor device. The method of the present invention comprises the steps of: (A) providing a metal foil; (B) forming an insulating layer on the metal foil, the insulating layer having a portion serving as a gate insulating film; (C) forming a supporting substrate on the insulating layer; (D) etching away a part of the metal foil to form a source electrode and a drain electrode therefrom; (E) forming a semiconductor layer in a clearance portion located between the source electrode and the drain electrode by making use of the source and drain electrodes as a bank member; and (F) forming a resin film layer over the insulating layer such that the resin film layer covers the semiconductor layer, the source electrode and the drain electrode. In the step (F), a part of the resin film layer interfits with the clearance portion located between the source and drain electrodes.</p>
申请公布号 EP2571043(A1) 申请公布日期 2013.03.20
申请号 EP20110780349 申请日期 2011.04.22
申请人 PANASONIC CORPORATION 发明人 SUZUKI, TAKESHI;HIRANO, KOICHI
分类号 H01L21/336;G02F1/1368;G09F9/00;G09F9/30;H01L29/41;H01L29/417;H01L29/786;H01L51/50 主分类号 H01L21/336
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