| 摘要 |
<p>PURPOSE: A solar cell manufacturing device is provided to effectively maintain the flatness of a substrate by supporting the substrate using vacuum absorptive force. CONSTITUTION: A shower head(20) supplies gas to a substrate in a processing chamber(10). A gas supply pipe(21) and a supply pump(22) supply gas by being connected to the shower head. A vacuum forming device(50) includes an air intake tube(52) connected to the inside of the processing chamber, and a vacuum pump(51) forming vacuum pressure. A feeding roller(30) provides a roll-shaped flexible substrate(S) to the inside of a reaction chamber. A heater(60) heats the flexible substrate through a contact or non-contact method.</p> |
