发明名称 PULSE-PERIODIC ELECTRIC-DISCHARGE EXCIMER LASER
摘要 FIELD: physics.SUBSTANCE: laser has an elongated housing in which there is a gas flow generating system, a UV pre-ioniser, elongated ground electrode and high-voltage electrode. The laser housing is in form of a metal pipe with the ground electrode mounted on its inner surface, and a dielectric pipe inside said metal pipe, on the outer surface of which the UV pre-ioniser is and the partially transparent high-voltage electrode are mounted. Capacitors and components of the discharge feed circuit, for example a magnetic coupling, can be placed inside the dielectric pipe.EFFECT: high generation energy and average power of laser radiation with high reliability of operation of the laser.2 cl, 1 dwg
申请公布号 RU2477912(C2) 申请公布日期 2013.03.20
申请号 RU20110120086 申请日期 2011.05.20
申请人 BORISOV VLADIMIR MIKHAJLOVICH 发明人 BORISOV VLADIMIR MIKHAJLOVICH
分类号 H01S3/03;H01S3/097 主分类号 H01S3/03
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