发明名称 |
PRESSURE SENSING AND FLOW CONTROL IN DIFFUSION- BONDED PLANAR DEVICES FOR FLUID CHROMATOGRAPHY |
摘要 |
Flow through pressure sensors for use in fluid chromatography systems include a planar device formed from diffusion bonding of a plurality of metallic sheets and at least one sensing element. The planar device has a top surface, a bottom surface and a flow through channel. A diaphragm formed from a portion of one of the top or bottom surfaces is located adjacent to a sensing region of the flow through channel and is attached to the sensing element. The diaphragm is sized to deflect a distance in response to fluid pressure in the sensing region, which has an internal volume of less than about 25 microliters. The diaphragm and attached sensing element form a pressure sensor that measures strain or deflection of the diaphragm to calculate a pressure within the sensing region. |
申请公布号 |
EP2569070(A1) |
申请公布日期 |
2013.03.20 |
申请号 |
EP20110781179 |
申请日期 |
2011.05.10 |
申请人 |
WATERS TECHNOLOGIES CORPORATION |
发明人 |
BUNNER, BERNARD;GERHARDT, GEOFF, C.;DOURDEVILLE, THEODORE, A. |
分类号 |
B01D15/10;B01D15/16;B01L3/00;G01L9/00;G01L15/00;G01L19/00;G01N30/00;G01N30/32;G01N30/34;G05D7/06 |
主分类号 |
B01D15/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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