发明名称 Gate-induced strain for performance improvement of a cmos semiconductor apparatus
摘要 There is disclosed an apparatus including a substrate (105, 115) defining an interior of the apparatus, a device exterior to the substrate including a gate electrode (130, 132), and a straining layer (213, 214) exterior to the gate electrode and exterior to the substrate.
申请公布号 EP2273547(A3) 申请公布日期 2013.03.20
申请号 EP20100011429 申请日期 2003.12.18
申请人 INTEL CORPORATION 发明人 HOFFMANN, THOMAS;CEA, STEPHEN;GILES, MARTIN
分类号 H01L21/8238;H01L21/28;H01L29/10;H01L29/49 主分类号 H01L21/8238
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