发明名称 |
Gate-induced strain for performance improvement of a cmos semiconductor apparatus |
摘要 |
There is disclosed an apparatus including a substrate (105, 115) defining an interior of the apparatus, a device exterior to the substrate including a gate electrode (130, 132), and a straining layer (213, 214) exterior to the gate electrode and exterior to the substrate. |
申请公布号 |
EP2273547(A3) |
申请公布日期 |
2013.03.20 |
申请号 |
EP20100011429 |
申请日期 |
2003.12.18 |
申请人 |
INTEL CORPORATION |
发明人 |
HOFFMANN, THOMAS;CEA, STEPHEN;GILES, MARTIN |
分类号 |
H01L21/8238;H01L21/28;H01L29/10;H01L29/49 |
主分类号 |
H01L21/8238 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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